¥ë¥Í¥µ¥¹¤¬³°Éô°ÑÂ÷¤¹¤ë¥â¥Î¤Îµ»½ÑÃßÀѤËÅê»ñ¤¹¤ëÍýͳ¡¿Ãæ¥Î¿¹ À¶·±
¥ë¥Í¥µ¥¹¥¨¥ì¥¯¥È¥í¥Ë¥¯¥¹¤¬¡¢¼«¤é¤ÏÀ½Â¤¤»¤ºÀ¸»º°ÑÂ÷¤¹¤ëͽÄê¤Î¼¡À¤ÂåȾƳÂΤÎÀ½Â¤µ»½Ñ¤ò¶¦Æ±³«È¯¤¹¤ë¹ñºÝ´ë¶ÈÏ¢¹ç¤Ë»²²Ã¤¹¤ë¡£¤Ê¤¼¡¢¼«¤é¤Ï¼ê³Ý¤±¤Ê¤¤¤â¤Î¤ÎÀ½Â¤µ»½Ñ¤Î³«È¯¤Ë¼ê´Ö¤ò³Ý¤±¡¢Åê»ñ¤¹¤ë¤Î¤«¡©º£²ó¤Ï¡¢¤½¤ÎÍýͳ¤Ë¤Ä¤¤¤Æ¸«¤Æ¹Ô¤³¤¦¡£
¥ë¥Í¥µ¥¹¤¬¤³¤ÎÅÙ»²²Ã¤¹¤ë¤³¤È¤Ë¤·¤¿¤Î¤ÏÆüËÜ´ë¶È11¼Ò¤¬½Ð»ñ¤·¤ÆÀßΩ¤·¤¿EUVL´ðÈ׳«È¯¥»¥ó¥¿¡¼¡£¤³¤Î´ë¶ÈÏ¢¹ç¤Ë¤Ï¡¢À¤³¦¥·¥§¥¢¤Ç¼ó°Ì¤Î¥¤¥ó¥Æ¥ë¡¢2°Ì¤Î¥µ¥à¥¹¥óÅŻҡ¢3°Ì¤ÎÂæÏÑÀÑÂÎÅÅÏ©À½Â¤¡ÊTSMC)¤â»²²Ã¤¹¤ë¡£Ï¢¹ç¤Î¸¦µæ³«È¯¤ÎÂоݤÏEUV¡Ê¶Ë»ç³°Àþ¡Ë¤ò»È¤Ã¤¿È¾Æ³ÂΤÎÀ½Â¤µ»½Ñ¡£EUV¤ò¸÷¸»¤È¤¹¤ëϪ¸÷µ»½Ñ¤Ï¡¢¥·¥ê¥³¥ó¥¦¥¨¥Ï¡¼¤Ë²óÏ©¥Ñ¥¿¡¼¥ó¤òž¼Ì¤¹¤ë¤Î¤Ë¸½¹Ôµ»½Ñ¤Î10ʬ¤Î1°Ê²¼¤Îû¤¤ÇÈŤθ÷¤ò»È¤¦¤¿¤á¡¢10¥Ê¥Î¥á¡¼¥È¥ëÂæ¤Î²óÏ©ÀþÉý¤ËÂбþ¤Ç¤¤ëµ»½Ñ¤È¤·¤ÆÍÎϻ뤵¤ì¤Æ¤¤¤ë¡£
°ìÊý¡¢¥ë¥Í¥µ¥¹¤Ï¡¢28¥Ê¥Î¥á¡¼¥È¥ë¤è¤ê¾®¤µ¤¤²óÏ©ÀþÉý¤ÎȾƳÂΤϡ¢¼«¼Ò¤ÇÀ½Â¤¤»¤ºTSMC¤Ê¤É¤ËÀ¸»º°ÑÂ÷¤·¤Æ¥³¥¹¥È¤òÂçÉý°µ½Ì¤¹¤ë·×²è¡£¤Ç¤Ï¡¢¤Ê¤¼¡¢¤ï¤¶¤ï¤¶¥ê¥½¡¼¥¹¤ò³ä¤¤¤Æ¡¢¼«¤é¤ÏÀ½Â¤¤·¤Ê¤¤È¾Æ³ÂΤÎÀ½Â¤µ»½Ñ¤Î³«È¯¤Ë»²²è¤¹¤ë¤Î¤«¡£ÊóÆ»¤Ë¤è¤ë¾¼Ò¤ËÀ½Â¤°ÑÂ÷¤¹¤ë¤È¤·¤Æ¤â¡¢µ»½Ñ¤¬Ê¬¤«¤é¤Ê¤¤¤ÈȯÃí¤¬Æñ¤·¤¤¤¿¤á»²²Ã¤ò·è¤á¤¿¤È¤¤¤¦¡£
¡Öµ»½Ñ¤¬Ê¬¤«¤é¤Ê¤¤¤ÈȯÃí¤¬Æñ¤·¤¤¡×
¤³¤ì¤Ï¡¢È¾Æ³ÂΤΤ褦¤ÊÀèüµ»½ÑʬÌî¤À¤±¤ÎÏäǤϤʤ¤¡£Ä¾Àܺà¤Î¤ß¤Ê¤é¤º¡¢ÊªÎ®¤ä¥µ¡¼¥Ó¥¹¤Ê¤É¤Î´ÖÀܺà¤â´Þ¤á¤Æ²¿¤ì¤ÎʬÌî¤Ë¤â¶¦Ä̤¹¤ëÏäÀ¡£¤¿¤È¤¨¤Ð¡¢²Ù¼ç¤ÎΩ¾ì¤ËΩ¤Ã¤Æʪή¥Í¥Ã¥È¥ï¡¼¥¯¤äºß¸Ë´ÉÍý¡¢Í¢Á÷´ÉÍý¤ÎºÇŬ²½¤ò¹Ô¤¦¥µ¡¼¥É¥Ñ¡¼¥Æ¥£¥í¥¸¥¹¥Æ¥£¥¯¥¹¤ä¡¢¥·¥¹¥Æ¥à³«È¯¡¢¹¹ðÀëÅÁ¡¢¿Í»ö¡¢·ÐÍý¤Ê¤ÉÍÍ¡¹¤Ê¶È̳Îΰè¤Ë¤ª¤¤¤Æ¶È̳°ÑÂ÷¤¬°ìÈÌŪ¤Ë¤Ê¤Ã¤Æ¤¤¤ë¡£¶È̳Îΰè¤À¤±¤Ç¤Ê¤¯¡¢´ë¶È¤Î¸ºßÍýͳ¤½¤Î¤â¤Î¤ä¾Íè¤òÀꤦ´ë¶È»ÈÌ¿¡¢»ö¶ÈÎΰè¤ÎÁªÄê¡¢ÀïάΩ°Æ¤¹¤é³°Éô¤Ë°ÑÂ÷¤µ¤ì¤ë»þÂå¤Ç¤¢¤ë¡£
³¤¤Ï¤³¤Á¤é
¥ë¥Í¥µ¥¹¤¬¤³¤ÎÅÙ»²²Ã¤¹¤ë¤³¤È¤Ë¤·¤¿¤Î¤ÏÆüËÜ´ë¶È11¼Ò¤¬½Ð»ñ¤·¤ÆÀßΩ¤·¤¿EUVL´ðÈ׳«È¯¥»¥ó¥¿¡¼¡£¤³¤Î´ë¶ÈÏ¢¹ç¤Ë¤Ï¡¢À¤³¦¥·¥§¥¢¤Ç¼ó°Ì¤Î¥¤¥ó¥Æ¥ë¡¢2°Ì¤Î¥µ¥à¥¹¥óÅŻҡ¢3°Ì¤ÎÂæÏÑÀÑÂÎÅÅÏ©À½Â¤¡ÊTSMC)¤â»²²Ã¤¹¤ë¡£Ï¢¹ç¤Î¸¦µæ³«È¯¤ÎÂоݤÏEUV¡Ê¶Ë»ç³°Àþ¡Ë¤ò»È¤Ã¤¿È¾Æ³ÂΤÎÀ½Â¤µ»½Ñ¡£EUV¤ò¸÷¸»¤È¤¹¤ëϪ¸÷µ»½Ñ¤Ï¡¢¥·¥ê¥³¥ó¥¦¥¨¥Ï¡¼¤Ë²óÏ©¥Ñ¥¿¡¼¥ó¤òž¼Ì¤¹¤ë¤Î¤Ë¸½¹Ôµ»½Ñ¤Î10ʬ¤Î1°Ê²¼¤Îû¤¤ÇÈŤθ÷¤ò»È¤¦¤¿¤á¡¢10¥Ê¥Î¥á¡¼¥È¥ëÂæ¤Î²óÏ©ÀþÉý¤ËÂбþ¤Ç¤¤ëµ»½Ñ¤È¤·¤ÆÍÎϻ뤵¤ì¤Æ¤¤¤ë¡£
¡Öµ»½Ñ¤¬Ê¬¤«¤é¤Ê¤¤¤ÈȯÃí¤¬Æñ¤·¤¤¡×
¤³¤ì¤Ï¡¢È¾Æ³ÂΤΤ褦¤ÊÀèüµ»½ÑʬÌî¤À¤±¤ÎÏäǤϤʤ¤¡£Ä¾Àܺà¤Î¤ß¤Ê¤é¤º¡¢ÊªÎ®¤ä¥µ¡¼¥Ó¥¹¤Ê¤É¤Î´ÖÀܺà¤â´Þ¤á¤Æ²¿¤ì¤ÎʬÌî¤Ë¤â¶¦Ä̤¹¤ëÏäÀ¡£¤¿¤È¤¨¤Ð¡¢²Ù¼ç¤ÎΩ¾ì¤ËΩ¤Ã¤Æʪή¥Í¥Ã¥È¥ï¡¼¥¯¤äºß¸Ë´ÉÍý¡¢Í¢Á÷´ÉÍý¤ÎºÇŬ²½¤ò¹Ô¤¦¥µ¡¼¥É¥Ñ¡¼¥Æ¥£¥í¥¸¥¹¥Æ¥£¥¯¥¹¤ä¡¢¥·¥¹¥Æ¥à³«È¯¡¢¹¹ðÀëÅÁ¡¢¿Í»ö¡¢·ÐÍý¤Ê¤ÉÍÍ¡¹¤Ê¶È̳Îΰè¤Ë¤ª¤¤¤Æ¶È̳°ÑÂ÷¤¬°ìÈÌŪ¤Ë¤Ê¤Ã¤Æ¤¤¤ë¡£¶È̳Îΰè¤À¤±¤Ç¤Ê¤¯¡¢´ë¶È¤Î¸ºßÍýͳ¤½¤Î¤â¤Î¤ä¾Íè¤òÀꤦ´ë¶È»ÈÌ¿¡¢»ö¶ÈÎΰè¤ÎÁªÄê¡¢ÀïάΩ°Æ¤¹¤é³°Éô¤Ë°ÑÂ÷¤µ¤ì¤ë»þÂå¤Ç¤¢¤ë¡£
³¤¤Ï¤³¤Á¤é